procedure whereby a spectrum, generated by peak synthesis, is adjusted to match a measured spectrum

intensity distribution in the spectrum for particles originally at one energy but which are emitted at lower energies due to one or more inelastic scattering processes

intensity distribution obtained from a model for the differential inelastic scattering cross section with respect to energy loss and the three-dimensional distribution of the emitting atoms in the surface region

difference between the experimentally acquired spectrum and the synthesized spectrum

background calculated to fit the measured spectrum at points at higher and lower kinetic energy than the peak or peaks of interest such that the background contribution at a given kinetic energy is in a fixed proportion to the total peak area above that background for higher kinetic energies.

procedure whereby a synthetic spectrum is generated using either model or experimental peak shapes in which the number of peaks, peak shapes, peak widths, peak positions, peak intensities, and background shape and intensity are adjusted for peak fitting

mean kinetic energy of the detected particles in the energy dispersive portion of the energy analyser